色谱/质谱联用法测定NF_3中微量CF_4

Determination of Trace CF_4 in NF_3 by GC/MS

摘要: 本文利用色谱质谱联用技术对NF3中微量CF4进行了测定。采用选择离子监测 (SIM)方式测定 ,定量选择离子m z为 69,方法简单、准确、选择性好 ,CF4浓度在 55～ 550 0mg m3范围内与峰面积呈线性关系 ,方法最低检测浓度5.5mg m3,相对标准偏差 5.6%。

Abstract: Detection trace CF 4 in NF 3 by GC/MS was discussed in this paper. Determined by select ion monitor (SIM), quantitative select ion was 69, the method was simple and precise, selectivity was better, in the range of 55～5500 mg/m 3, concentration was linear response to peak area. The minimum detection concentration was 5.5 mg/m 3, the relative standard deviations were 5.6 %.