Determination of Trace CF_4 in NF_3 by GC/MS

Detection trace CF 4 in NF 3 by GC/MS was discussed in this paper. Determined by select ion monitor (SIM), quantitative select ion was 69, the method was simple and precise, selectivity was better, in the range of 55～5500 mg/m 3, concentration was linear response to peak area. The minimum detection concentration was 5.5 mg/m 3, the relative standard deviations were 5.6 %.