Determination of Trace Impurities N_2O and NO in High Purity Nitrogen Gas by Atmospheric Pressure Ionization Mass Spectrometer

This paper expressed the methods of determination of trace impurities in gases by Atmospheric Pressure Ionization Mass Spectrometer (API-MS). The trace impurities N 2O and NO in high purity nitrogen gas were determined quantitatively by API-MS, and the total uncertainty of the method was 15% and 17%, respectively. The analysis conditions and effects with determination of N 2O and NO by API-MS were studied and discussed.