Semiquantitative Analysis of Polycrystsl Silicon Film for Phosphorus by Ion Microprobe[J]. Journal of Chinese Mass Spectrometry Society, 1987, 8(2): 53-53.
Citation:
Semiquantitative Analysis of Polycrystsl Silicon Film for Phosphorus by Ion Microprobe[J]. Journal of Chinese Mass Spectrometry Society, 1987, 8(2): 53-53.
Semiquantitative Analysis of Polycrystsl Silicon Film for Phosphorus by Ion Microprobe[J]. Journal of Chinese Mass Spectrometry Society, 1987, 8(2): 53-53.
Citation:
Semiquantitative Analysis of Polycrystsl Silicon Film for Phosphorus by Ion Microprobe[J]. Journal of Chinese Mass Spectrometry Society, 1987, 8(2): 53-53.
Semiquantitative Analysis of Polycrystsl Silicon Film for Phosphorus by Ion Microprobe
A new method for ion microprobe determinating is described by whichthe interference factors are obtained using two standards and the semiquantita-tive analysis of polycrystal silicon film for phosphorus is realized. This me-thod is credible according to the experimental results.
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