Pyrolysis/Gas chromatography/Mass spectrometry AnalySis for Plasma P0lymer of VTMS[J]. Journal of Chinese Mass Spectrometry Society, 1992, 13(2): 53-53.
Citation: Pyrolysis/Gas chromatography/Mass spectrometry AnalySis for Plasma P0lymer of VTMS[J]. Journal of Chinese Mass Spectrometry Society, 1992, 13(2): 53-53.

Pyrolysis/Gas chromatography/Mass spectrometry AnalySis for Plasma P0lymer of VTMS

  • This paper reports the analysis and identification of the pyrolysis species of plasma polymer of vinyltrimethylsilane (VTMS) with Ar, N_2and benzene (Bz) mixture system by means of PGC-MS. The PGC-MS results have indicated that the pyrolysis products of plasma polymer of VTMS/Ar, VTMS/N_2 and VTMS/Bz three systems consisted of 8, 10, and 16 main compounds, respectively. According to the PGC-MS data, the chemical structure of plasma polymer of VTMS is discussed, and the reaction mechanism is deduced for plasma polymerization of VTMS.
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