The Exploration for Possibility of Quantitative Analysis without Standards by SIMS

Conventional quantitative analysis of SIMS is based on the calibration with standards. In this paper, some impurities in Aluminum bulk material were quantitatively analyzed using natural abundance of the isotope and known relative secondary ion yield of the elements. The analysis results are compared with the results of other quantitative analysis techniques, such as atomic emission spectrometer and glow discharge mass spectrometer(GDMS).