The Calibration of the Atom Probe System

Atom Probe field ion microscopy has been widely used, The calibration of the instrument is very important in order to obtain a good mass resolution. This paper systematically discusses the different methods to calibrate the equipment experimentally and theoretically. We offer a new method and acquire good equipmental parameters. We study the influences which affect the accuracy of our experimental data, and show the advantages and disadvantages of both methods also.