Determination of 23 Elements in Ultra-high Purity Ge by GDMS
-
-
Abstract
A procedure for determinating 23 elements in ultra-high purity Ge by Glow Dis-charge Mass Spectrometer (GDMS) is reported in this paper. Experiments show thatwith its low detection limit of 10 ppt,GDMS can be used to analyse ultra-trace elementsquantitatively in 7N,even 8N pruity Ge samples.
-
-