Development of Atom Probe

Development of Atom Probe[J]. Journal of Chinese Mass Spectrometry Society, 1990, 11(1): 22-22.

Citation:

Development of Atom Probe[J]. Journal of Chinese Mass Spectrometry Society, 1990, 11(1): 22-22.

Citation:

Development of Atom Probe[J]. Journal of Chinese Mass Spectrometry Society, 1990, 11(1): 22-22.

Abstract

In this paper, the development of Linear-type Time-of-Flight Atom Probe has been described. The resolution M/△M is about 300, and the detect efficiency is about 50%. We also discuss how the mass resolution can be further improved.

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