A Study on Quantitative Method for Analysing Some Impurities in Powder Samples with ID-SIMS
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Abstract
A quantitative analysis method for Fe, Ni, Cu in Y_2O_3 Powder and B in Al_2O_3 powder was studied by CAMECA IMS-300 and IMS-3F with Isotope Dilution Secondary Ion Mass Spectrometry (ID-SIMS). In this method the spike solutions were added into Y_2O_3 powder and Al_2O_3 powder respectively. The results and present problems are reported in this paper.
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