Determination of Trace Impurities in Polysilicon by Glow Discharge Mass Spectrometry

As a powerful tool for the analysis of high pure metal and semiconductor, glow discharge mass spectrometry (GDMS) was extended applied in China. The primary theory and application of GDMS were introduced, and the advantages and disadvantages were descript through the semi quantitative analysis of the solar cell polysilicon by GDMS. Finally the application of GDMS in high pure materials analysis was prospected.