Investigation of Plasma PoIymerization of Vinyldimethyl EthoXysilane by GC/MS

Investigation of Plasma PoIymerization of Vinyldimethyl EthoXysilane by GC/MS[J]. Journal of Chinese Mass Spectrometry Society, 1992, 13(4): 67-67.

Citation:

Investigation of Plasma PoIymerization of Vinyldimethyl EthoXysilane by GC/MS[J]. Journal of Chinese Mass Spectrometry Society, 1992, 13(4): 67-67.

Citation:

Investigation of Plasma PoIymerization of Vinyldimethyl EthoXysilane by GC/MS[J]. Journal of Chinese Mass Spectrometry Society, 1992, 13(4): 67-67.

Abstract

In the present paper gas condensate and polymer film of plasma polymerization of Vinyidimethyl ethoxysilane (VDMES) have been tested by GC/MS and Py/GC/MS. Many kinds of compound have been identified and radical mechanism for plasma polymerization in gas phase and surface of polymer film was postulated.

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