Development of the Analyzer for a Miniature Insert Quadrupole Mass Spectrometer Array

A structure of a miniature insert analyzer for the quadrupole mass spectrometer array (QMSA) based on the present situation of the machinable ceramics and the ceramic precision machining in china was developed and designed. The machining precision of the rods was required on the basis of the relation of mass range and mass resolution of QMSA. The total configuration and the key components of the inset analyzer were signed and mun-ufactured. The key componts were checked and measured. The size and weight of a miniature insert analyzer is 15. 4 cm3 and 50. 3 g. The mass range and mass resolution of analyzer is 50 aum and 1 amu, respectively. Finally, the application prospect of the miniature quadrupole mass spectrometer array was expected.