Abstract: Primary ion beam spot of microbeam analysis instrument is more and more fine, and its diameter has reached micron level and even sub micron level. Instrument vacuums have advanced to ultra-high levels, and which have excellent stability. Therefore, it is urgent to develop a kind of high resolution sample stage. An innovative 3D sample stage in a new TOF-SIMS instrument was developed aiming at the defects of commercial instrument, which purpose is to achieve precise, reproducible, sample positioning in an ultra-high vacuum environment. Through high precision sliding table arranged in the vacuum cavity external driving small welded bellows telescopic, 3D motion was transferred. Externally mounted motors eliminated out-gassing, while the use of small bellow-sealed drives avoided the stresses associated with large diameter bellows. Only UHV-compatible materials and dry lubricants was used, in order to solve the lubrication problem of friction parts in high vacuum environment. A reproducibility of 0.94, 1.83, 0.38 μm for 40 mm moving range and minimum step length 0.1 μm on all axes in a vacuum of 1.19×10^-6 Pa were achieved. Newly designed externally mounted motor overcame insulating material outgassing problems within the vacuum chamber. In addition, it does not introduce any additional electronic components and wiring, thus will not cause electro-magnetic interferences within the analyzer chamber, and its travelling rang will not be restricted. These special functions are suited not only for SIMS, but also for many other high-resolution analytical instruments that require ultra-high vacuum and ultra-clean (contamination-free) environments.