Abstract: In-situ microanalysis technology has been extensively used in the fields of geoscience, material analysis and bioimaging due to its advantages including simplicity, rapidity, real-time online, spatial resolution, etc. However, without proper sample pretreatment and separation process, the complex sample matrix will have a significant impact on the measured results, i.e. matrix effect, which should be properly corrected by using the matrix-matched reference material. Meanwhile, due to the grave shortage of related reference material, the traceability of in-situ microanalysis has not been properly solved, it is difficult to obtain comparable and reliable measurements. This situation has become a bottleneck that hinders the application and development of in situ microanalysis technology, and is also the focus of relevant application fields and institutes of metrology. In this review, the reference materials for in situ elemental and isotopic microanalysis were systematically introduced, including technical requirements, preparation technology and existing reference materials, etc. Furthermore, the development tendency of reference materials for in situ microanalysis was prospected.