Abstract: Inductively coupled plasma sector field mass spectrometers(ICP-SFMS) mainly include high-resolution ICP-MS (HR-ICP-MS), multi collector ICP-MS (MC-ICP-MS) and full spectrum ICP-MS. The HR-ICP-MS generally adopts the revise Nier-Johnson magnetic-electrostatic sectors double focusing geometry, the MC-ICP-MS generally adopts the forward Nier Johnson electrostatic-magnetic sectors double focusing geometry, and the full spectrum ICP-MS with detector array adopts the Mattauch-Herzog geometry. The performance improvement of ICP-SFMS is mainly reflected in the frequency turning ICP design, which improves the tolerance and reliability to the matrix, the J-type sampler cone and X-type skimmer cone are used to improve the sensitivity, the large pumping speed interface pump can reduce the vacuum in the interface area and improve the sensitivity of the instrument, and the improved ion transfer lens system can improve the abundance sensitivity of actinide isotopes. High resolution isotope ratio can be obtained by changing the slit width in front of the detectors. The use of multiple Daly detectors can improve the detection ability of low abundance isotopes. The signal output of low abundance isotope measurement can be improved by automatically switching the high resistance of Faraday cup amplifier through software. The improvement of the performance of ICP-SFMS makes it more widely used in nuclear geological analysis. In situ U-Pb dating of pitchblende micro area can be carried out by LA-HR-ICP-MS, uranium isotope fractionation can be determined with high precision by MC-ICP-MS, and refractory elements such as U, Th, Nb, Ta, Zr and Hf can be determined by LA-HR-ICP-MS.