Abstract: CCD-SIMS Image Digitized Detection System and Its Application to the Tin Anticorrosion StudyLu S F(The University of Western Ontario, London,Ontario N6A 5B7, Canada)Cao Y M (Fudan University, Shanghai 200433, Chinal)Received 1993-08-12.Abstract:This paper presents the construction of a prototype system consisted of charge coupled devices (CCD), detecting and digitizing secondary ion images. Since the inventionat Bell Laboratories in 1970, CCD has been used as detectors spanning variety of electro-optical and ion-optical applications due to its some good performances, such as low noise, high dynamic range, liner response and three-dimensional analytical ability so that it has been prompted into the applications as a detector in ion microscopy. We applied CAMECA IMS-3f equipped with CCD detecting system to study the 3-D structures of tin.Keywords: three-dimensional structures, charge coupled devices (CCD), digitizedimage detection system.