Abstract: Environmental monitoring is an essential monitoring method in the enhanced international safeguards. Particle analysis is a high sensitive analytical technology. The particle analysis can obtain more information than bulk analysis. It has been a conventional analytical method in the international safeguards system of International Atomic Energy Agency(IAEA). The Secondary Ion Mass Spectrometer (SIMS), especially dynamic SIMS, is the most suitable instrument for particle isotopic analysis. Sample preparation is a key technical issue for analyzing swipe samples and environmental samples with various characteristics by SIMS.