Abstract: Research of Determination Method for LiNbO_3, Materials by ion MicroprobeYou Junfu(Shanghai institute of TestingTechnology, Shanghai 200233, China)Abstract:During determing LiNbO, crystal by ion microprobe, the charges due to the primaryion bombardment can in turn arrest the bombardment of the primary ion, the background noises of instrument and the polyatomic ions can interference measured signal.In this paper the determination method, some results and present problems were reported.Keywords: LiNbO_3, crystal, SIMS, ion microprobe, depth profile determination of ionimplanted sample