Abstract: The progress in determination of trace elements by thermal surface io-nization IDMS during 1973-1984 has been reviewed according to 406 referne-ces. In this paper the applications of IDMS to geology, chronology, nuclearscience, nuclear industry, marine chemistry, marine geology, biochemistry,medicin, metallurgy, environmental science, standard samples and standardmaterial analysis, analysis of high purificatory agents and other fields aredescyibed. In addition, the recent progress of IDMS including negative ionthermal surface ionization, resin bead technique and thermionic quadrupolemass spectrometer for trace elements analysis are introduced.