Abstract: Sputtered Neutral Mass Spectroscopy or Secondary Neutral Mass Spec-troscopy(SNMS)is a new surface analytical technique. Similar to secondaryion mass spectroscopy (SIMS), the detect limit of SNMS can reach to ppm-ppb. The sputtering yeilds of neutrals are not influenced by different matrix,therefore, the quantification of SNMS is simple and correct. Depth profileof direct bombardment mode SNMS may use low energy primary ion as bom-barding source to avoid cascade effect and obtain highest depth resolution.