Abstract: In this paper a new method for analysis of impurity element in artificalinsulating crystals with spark source mass spectrometry has been proposed.The crystal is cut into a piece of diameter 5mm and thickness 0.3mm with aslicer, and it is put in the trought terminal of "T" type electrode. The "T"type electrode with crystal piece is sparked against counter-electrode of highpure aluninium by high voltage breakdown. The suitable breakdown conditionhas been selected. The method has the advantages of less contamination,higher sensitivity and stable-ratio of ion current intensity between sampleand counter electrode. A procedure for quantitative analysis of syntheticreference samples is studied. Some artifical crystals have been analysed.