Abstract: Non-conducting powder samples usually are mixed with a conducting host-matrix before glow discharge mass spectrometry (GD-MS) determination. Infiltration technique under high pressure was applied on GeO₂ sample preparation of GD-MS. Appropriate parameters of mixing procedure are discussed. This method ensures good homogeneity, relative low contamination and satisfying precision. Analytical results indicate that infiltration technique is suitable for the production of oxide samples.