原子探针的研制

Development of Atom Probe

摘要: 本文叙述直线型原子探针的设计和制造技术,其质量分辨本领M/△M≈300,探测效率约50％。文中还讨论了提高质量分辨本领的方法。

Abstract: In this paper, the development of Linear-type Time-of-Flight Atom Probe has been described. The resolution M/△M is about 300, and the detect efficiency is about 50%. We also discuss how the mass resolution can be further improved.