Abstract: The nine elements content in 6063 (trademark) alumina alloy standard sample (E421a) were determined， and the relative sensitivity factor (RSF) of each element was obtained. The effects of discharge current, gas rate and the ion source temperature for the RSF were investigated. The results show that the discharge current and gas rate have the obvious effects for the RSF， while the ion source temperature has no effects. In order to verify the RSF accuracy, the nine elements content of another standard sample (E422a) were analyzed by GD-MS through the obtained RSF calibration and the relative deviation， which the actual and marked-value are among 0.5%—5.6% with precision of less than 5%. Using the same method for the analysis of 7 series alumina alloy, the good accuracy and precision are achieved, and prove by the comparison of ICP-AES analytical results.