Abstract: The method based on the determination of trace elements in geological samples by sector high resolution inductively coupled plasma mass spectrometry with mixed acid digestion procedure has been evaluated. The evaluation show that the results of 29 elements including Li, Cr, Co, Ni, Cu, Zn, Ga, Rb, Y, Cs, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, W, Tl, Bi, Th and U are satisfactory; V, Sr, Nb, Mo, In, Sb, Ba and Pb are acceptable; Sc, Cd, Hf, Ti, Mn, Fe, Ge and Sn have of large deviations, Be, Ta, Zr, As and Se are worse.