涡轮分子泵电源原理及维修方法探讨
-
摘要: 本文简述BALZERS公司生产的涡轮分子泵电源的工作原理和工作过程,绘出了重要工作点的波形并给出了工作参数,根据作者的实践对电源的维修和改进提出了方案供探讨。Abstract: Maintenance of the Power of Turbomolecular PumpLiu Wengui(Yichang institute of Geology,Yichang 443003,Hubei,China)Received Abstract:The principle and the main parameters of the power of the turbmolecular pump made by BALAERS Company are briefly described.The maintenance procedure has been discussed according to the practice of the author.Keywords:turbomlecular pump;maintenance; procedure