Abstract: A Quantitative SIMS Depth Profiling Method Calibrated by a Modified ISS TechniqueSong Linggen; Zhang Yongxia; Cai Lei; ZongXiangfu(Materials Science Department, Fudan University, Shanghai 200433,China)Abstract: Quantitative depth profiling aims at determining the concentration of a given element and also its distribution in depth of a given sample. Traditional ion Scattring Spectroscopy (ISS) was modified to quatitatively calibrate depth profiles acquired by Secondary ion Mass Spectrometry (SIMS). Checked by Ruther fold Backscattering (RBS)technique,the accuracy and precision of aforementioned analysis is better than 10% andwithin 5%, respectively. The technical background, basic principle, experimental procedure, advantages and disadvantages of this method were discused in details.Keywords: ISS; SIMS; Quantification