Abstract: Analysis and Characterization of Metals and Semiconductors by GDMS and SSMSLiu Xiande(National Research Centre for Environmetal Analysis and Measurements, Beijing 100029, China )M. Van Straaten; R. Gijbels; F. Adams(Department of Chemistry, University of Antwerp, UIA,B- 2610 Wilrijk, Belgium)Abstract: Glow Discharge Mass Spectrometry(GDMS) and Spark Source Mass Spectrometry (SSMS)are the main analytical techniques allowing the direct and complete quantitative analysis of high purity solid materials. GDMS and SSMS with their strengths and limitations are complementary rather than mutually exclusive in a variety of applications in the analysis and characterization of solid materials. More information and better analytical results are achievable by adequate usage of both techniques. In this paper, two, applications of GDMS in precious metal analysis are presented. Analysis of high purity gallium is discussed with emphasis on surface segregation. Investigation of the distribution of trace elements with SSMS is described.Keywords: Glow Discharge Msss Spectrometry(GDMS);Spark Source Mass Spectrometry (SSMS); metal; semiconductor