Abstract: The Latest Developments on SIMS —A Review of the gth International Conference on SIMSZou Qingsheng;Zha Liangzhen (Tsinghua Universety,Beijing 100084,China)Abstract:Secondary Ion Mass Spectrometry(SIMS)is becoming an unique and importabt surface analysis tool due to its high sensetevety,wide dynamic range and excellent depth resolution.Based on the gth International Conference on SIMS held in November 1993,some latest developments on SIMS are reviewed in this paper.The scope covers all aspects of SIMS:fundamentals,instrumentation,quantification,applications and related techniques.Keywords:SIMS,latest developments,review